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硅单晶生长中氩气流动对氧碳含量的影响 期刊论文
半导体学报, 2001, 卷号: 22, 期号: 11, 页码: 1416
Authors:  任丙彦;  张志成;  刘彩池;  郝秋燕;  王猛
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