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基于MEMS工艺技术的无线网络压力传感器芯片设计及应用研究 期刊论文
电子技术应用, 2010, 卷号: 36, 期号: 7, 页码: 13-16
Authors:  郭源生;  刘忠立
Adobe PDF(295Kb)  |  Favorite  |  View/Download:1116/329  |  Submit date:2011/08/16
The ICP etching technology of 3C-SiC films 会议论文
INTERNATIONAL MEMS CONFERENCE 2006, 34: 511-515 2006, Singapore, SINGAPORE, MAY 09-12, 2006
Authors:  Ning J (Ning Jin);  Gong QC (Gong Quancheng);  Sun GS (Sun Guosheng);  Liu ZL (Liu Zhongli)
Adobe PDF(325Kb)  |  Favorite  |  View/Download:1250/476  |  Submit date:2011/07/14