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Effect of Silicon-on-Insulator Substrate on Residual Strain in 3C-SiC Films 期刊论文
半导体学报, 2005, 卷号: 26, 期号: 9, 页码: 1681-1687
Authors:  Wang Xiaofeng;  Huang Fengyi;  Sun Guosheng;  Wang Lei;  Zhao Wanshun;  Zeng Yiping;  Li Haiou;  Duan Xiaofeng
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