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镜面起伏对1.55 μm Si基MEMS光滤波器的影响 期刊论文
光子学报, 2003, 卷号: 32, 期号: 6, 页码: 661-664
Authors:  左玉华;  毛容伟;  黄昌俊;  蔡晓;  李传波;  成步文;  罗丽萍;  高俊华;  白云霞;  姜磊;  马朝华;  王良臣;  余金中;  王启明
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