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半导体晶片精密化学机械抛光剂 专利
专利类型: 发明, 申请日期: 2007-10-03, 公开日期: 2009-06-04, 2009-06-11
Inventors:  朱蓉辉;  惠峰;  卜俊鹏;  郑红军;  赵冀
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双面抛光机 专利
专利类型: 发明, 申请日期: 2007-09-19, 公开日期: 2009-06-04, 2009-06-11
Inventors:  朱蓉辉;  赵冀;  惠峰;  卜俊鹏;  郑红军
Adobe PDF(324Kb)  |  Favorite  |  View/Download:1067/189  |  Submit date:2009/06/11
扩散型兆声波清洗槽 专利
专利类型: 发明, 申请日期: 2007-09-05, 公开日期: 2009-06-04, 2009-06-11
Inventors:  朱蓉辉;  惠峰;  卜俊鹏;  郑红军;  赵冀
Adobe PDF(447Kb)  |  Favorite  |  View/Download:1075/252  |  Submit date:2009/06/11