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973 Program[2011CB01 1 973 program [2006CB6 1 973 program[2006CB92 1
Chinese National Key 1 Chinese National Key 1 Chinese National Key 1
Institute of Semicon 1 National Basic Resea 1 National High Techno 1
National High-Tech R 1 National Key Basic R 1 National Natural Sci 1
National Natural Sci 1 National Natural Sci 1 National Natural Sci 1
National Natural Sci 1 Project supported by 1 Support from the Nat 1