Simulation and fabrication of the SiC-based clamped-clamped filter
Zhao, YM; Ning, J; Sun, GS; Liu, XF; Wang, L; Ji, G; Zhao, WS; Li, JM; Yang, FH; Zhao, YM, Chinese Acad Sci, Inst Semicond, State Key Labs Transducer Technol, Beijing 100083, Peoples R China.
2008
会议名称9th International Conference on Solid-State and Integrated-Circuit Technology
会议录名称2008 9TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY
页码VOLS 1-4: 2524-2527
会议日期OCT 20-23, 2008
会议地点Beijing, PEOPLES R CHINA
出版地345 E 47TH ST, NEW YORK, NY 10017 USA
出版者IEEE
ISBN978-1-4244-2185-5
部门归属[zhao, yongmei; ning, jin; sun, guosheng; liu, xingfang; wang, liang; yang, fuhua] chinese acad sci, inst semicond, state key labs transducer technol, beijing 100083, peoples r china
摘要In this paper, the SiC-based clamped-clamped filter was designed and fabricated. The filter was composed of two clamped-clamped beam micromechanical resonators coupled by a spring coupling beam. Structural geometries, including the length and width of the resonator beam and coupling beam, were optimized by simulation for high frequency and high Q, under the material properties of SiC. The vibrating modes for the designed filter structure were analyzed by finite element analysis (FEA) method. For the optimized structure, the geometries of resonator beams and coupling beams, as well as the coupling position, the SiC-based clamped-clamped filter was fabricated by surface micromaching technology.
关键词Micromechanical Resonators Frequency
学科领域半导体材料
主办者IEEE Beijing Sect.; Chinese Inst Elect.; IEEE Electron Devices Soc.; IEEE EDS Beijing Chapter.; IEEE Solid State Circuits Soc.; IEEE Circuites & Syst Soc.; IEEE Hong Kong EDS, SSCS Chapter.; IEEE SSCS Beijing Chapter.; Japan Soc Appl Phys.; Elect Div IEEE.; URSI Commiss D.; Inst Elect Engineers Korea.; Assoc Asia Pacific Phys Soc.; Peking Univ, IEEE EDS Student Chapter.
收录类别CPCI-S
语种英语
文献类型会议论文
条目标识符http://ir.semi.ac.cn/handle/172111/8310
专题中国科学院半导体研究所(2009年前)
通讯作者Zhao, YM, Chinese Acad Sci, Inst Semicond, State Key Labs Transducer Technol, Beijing 100083, Peoples R China.
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Zhao, YM,Ning, J,Sun, GS,et al. Simulation and fabrication of the SiC-based clamped-clamped filter[C]. 345 E 47TH ST, NEW YORK, NY 10017 USA:IEEE,2008:VOLS 1-4: 2524-2527.
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