On the performance analysis and design of a novel shared-layer integrated devices using RCE-p-i-n-PD/SHBT - art. no. 67820J
Shou-Li Z; De-Ping X; Ya-Li I; Hai-Lin C; Yin-Zhe C; Ang M; Ji-He L; Jun-Hua G; Shou-Li, Z, Zhejiang Univ Technol, Coll Informat Engn, Hangzhou 310014, Peoples R China.
2007
会议名称Conference on Optoelectronic Materials and Devices II
会议录名称OPTOELECTRONIC MATERIALS AND DEVICES II
页码6782: J7820-J7820 Part 1-2
会议日期NOV 02-05, 2007
会议地点Wuhan, PEOPLES R CHINA
出版地1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者SPIE-INT SOC OPTICAL ENGINEERING
ISSN0277-786X
ISBN978-0-8194-6945-8
部门归属[shou-li, zhou; ya-li, in] zhejiang univ technol, coll informat engn, hangzhou 310014, peoples r china; [de-ping, xiong] guangdong univ technol, sch phys & optoelect engn, guangzhou 510016, guangdong, peoples r china; [hai-lin, cui; yin-zhe, chong; ang, miao; ji-he, lv] beijing univ posts & telecommun, sch telecommun engn, beijing 100876, peoples r china; [jun-hua, gao] chinese acad sci, inst semicond, beijing 100083, peoples r china
摘要We have explored the shared-layer integration fabrication of an resonant-cavity-enhanced p-i-n photodector (RCE- p-i-n-PD) and a single heterojunction bipolar transistor (SHBT) with the same epitaxy grown layer structure. MOCVD growth of the different layer structure for the GaAs based RCE- p-i-n-PD/SHBT require compromises to obtain the best performance of the integrated devices. The SHBT is proposed with super-lattice in the collector, and the structure of the base and the collector of the SHBT is used for the RCE. Up to now, the DC characteristics of the integrated device have been obtained.
关键词Rce- P-i-n-pd
学科领域光电子学
主办者SPIE.; Chinese Opt Soc.; China Inst Commun.; Peoples Govt Wuhan Municipal.
收录类别其他
语种英语
文献类型会议论文
条目标识符http://ir.semi.ac.cn/handle/172111/7858
专题中国科学院半导体研究所(2009年前)
通讯作者Shou-Li, Z, Zhejiang Univ Technol, Coll Informat Engn, Hangzhou 310014, Peoples R China.
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Shou-Li Z,De-Ping X,Ya-Li I,et al. On the performance analysis and design of a novel shared-layer integrated devices using RCE-p-i-n-PD/SHBT - art. no. 67820J[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2007:6782: J7820-J7820 Part 1-2.
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