Accurate vibration detection of a rough surface - art. no. 683118

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	Accurate vibration detection of a rough surface - art. no. 683118
	Zeng, HL; Zhou, Y; Fan, ST; He, J; Zeng, HL, Chinese Acad Sci, Inst Semicond, Beijing 100864, Peoples R China.
	2008
会议名称	2nd Conference on Nanophotonics, Nanostructure and Nanometrology
会议录名称	NANOPHOTONICS,NANOSTRUCTURE,AND NANOMETROLOGY II
页码	6831: 83118-83118
会议日期	NOV 12-14, 2007
会议地点	Beijing, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	978-0-8194-7006-5
部门归属	[zeng, hualin; zhou, yan; fan, songtao; he, jun] chinese acad sci, inst semicond, beijing 100864, peoples r china
摘要	Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment.
关键词	Measurement Of Microvibration Nanometrology Interferometry Vibration Detection
学科领域	光电子学
主办者	SPIE.; Chinese Opt Soc.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/7808
专题	中国科学院半导体研究所（2009年前）
通讯作者	Zeng, HL, Chinese Acad Sci, Inst Semicond, Beijing 100864, Peoples R China.
推荐引用方式 GB/T 7714	Zeng, HL,Zhou, Y,Fan, ST,et al. Accurate vibration detection of a rough surface - art. no. 683118[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2008:6831: 83118-83118.

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