SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)
Fan YM; Zhang XW; You JB; Ying J; Tan HR; Chen NF; Zhang XW Chinese Acad Sci Inst Semicond Key Lab Semicond Mat Sci Beijing 100083 Peoples R China. E-mail Address: xwzhang@semi.ac.cn
2009
Source PublicationCHINESE PHYSICS LETTERS
ISSN0256-307X
Volume26Issue:5Pages:Art. No. 056801
AbstractCubic boron nitride (c-BN) films were deposited on Si(001) substrates in an ion beam assisted deposition (IBAD) system under various conditions, and the growth parameter spaces and optical properties of c-BN films have been investigated systematically. The results indicate that suitable ion bombardment is necessary for the growth of c-BN films, and a well defined parameter space can be established by using the P/a-parameter. The refractive index of BN films keeps a constant of 1.8 for the c-BN content lower than 50%, while for c-BN films with higher cubic phase the refractive index increases with the c-BN content from 1.8 at chi(c) = 50% to 2.1 at chi(c) = 90%. Furthermore, the relationship between n and rho for BN films can be described by the Anderson-Schreiber equation, and the overlap field parameter gamma is determined to be 2.05.
metadata_83[fan ya-ming; zhang xing-wang; you jing-bi; ying jie; tan hai-ren; chen nuo-fu] chinese acad sci inst semicond key lab semicond mat sci beijing 100083 peoples r china; [zhang xing-wang] hubei univ key lab ferroelect & piezoelect mat & devices hub wuhan 430062 peoples r china
KeywordBn Thin-films Refractive-index Ellipsometry Nucleation Diamond Density
Subject Area半导体材料
Funding OrganizationNational Natural Science Foundation of China 50601025 Supported by the National Natural Science Foundation of China under Grant No 50601025.
Indexed BySCI
Language英语
Date Available2010-03-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/7213
Collection中国科学院半导体研究所(2009年前)
Corresponding AuthorZhang XW Chinese Acad Sci Inst Semicond Key Lab Semicond Mat Sci Beijing 100083 Peoples R China. E-mail Address: xwzhang@semi.ac.cn
Recommended Citation
GB/T 7714
Fan YM,Zhang XW,You JB,et al. Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)[J]. CHINESE PHYSICS LETTERS,2009,26(5):Art. No. 056801.
APA Fan YM.,Zhang XW.,You JB.,Ying J.,Tan HR.,...&Zhang XW Chinese Acad Sci Inst Semicond Key Lab Semicond Mat Sci Beijing 100083 Peoples R China. E-mail Address: xwzhang@semi.ac.cn.(2009).Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001).CHINESE PHYSICS LETTERS,26(5),Art. No. 056801.
MLA Fan YM,et al."Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)".CHINESE PHYSICS LETTERS 26.5(2009):Art. No. 056801.
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