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VHF-PECVD法高速沉积氢化非晶/纳米晶相变阈硅薄膜及太阳能电池
徐艳月
Subtype博士
Thesis Advisor廖显伯
2004
Degree Grantor中国科学院半导体研究所
Place of Conferral北京
Subject Area材料物理与化学
Language中文
Date Available2009-04-13 ; 2009-07-09
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/5263
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
徐艳月. VHF-PECVD法高速沉积氢化非晶/纳米晶相变阈硅薄膜及太阳能电池[D]. 北京. 中国科学院半导体研究所,2004.
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