SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
一种纳米尺寸三角形空气槽的制作方法
屠晓光; 陈少武
2008-12-17
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2007-06-13
Language中文
Application NumberCN200710118868.1
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/4273
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
屠晓光,陈少武. 一种纳米尺寸三角形空气槽的制作方法[P]. 2008-12-17.
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