SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
砷化镓/砷化铝分布布拉格反射镜的湿法腐蚀方法
李若园; 徐波; 王占国
2007-10-31
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-04-26
Language中文
Application Number200610011792
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3855
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
李若园,徐波,王占国. 砷化镓/砷化铝分布布拉格反射镜的湿法腐蚀方法[P]. 2007-10-31.
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