SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
可以修整抛光晶片平整度的抛光头
朱蓉辉; 惠峰; 卜俊峰; 郑红军; 赵冀
2007-09-05
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-03-01
Language中文
Application Number200610011400
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3825
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
朱蓉辉,惠峰,卜俊峰,等. 可以修整抛光晶片平整度的抛光头[P]. 2007-09-05.
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