SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
一种新型键合用晶向对准装置
陈良惠; 郑婉华; 杨国华; 何国荣; 王玉平; 曹青; 郭良; 林学春
2006-11-08
Date Available2009-06-04 ; 2009-06-11
Subtype实用新型
Application Date2005-04-08
Language中文
Application Number200520015631
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3553
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
陈良惠,郑婉华,杨国华,等. 一种新型键合用晶向对准装置[P]. 2006-11-08.
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