SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
平板式电极结构
刁宏伟; 廖显伯; 曾湘波; 郝会颖; 徐艳月; 张世斌; 胡志华
2006-02-15
Date Available2009-06-04 ; 2009-06-11
Subtype实用新型
Application Date2004-12-23
Language中文
Application NumberCN200420009993.0
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3321
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
刁宏伟,廖显伯,曾湘波,等. 平板式电极结构[P]. 2006-02-15.
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200420009993.pdf(318KB) 限制开放--Application Full Text
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