SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
硅基光子集成的器件及制作方法
黄昌俊; 邓晓清; 成步文; 王红杰; 杨沁清; 余金中; 胡雄伟; 王启明
2003-11-05
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2002-04-26
Language中文
Application NumberCN02118525.5
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3011
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
黄昌俊,邓晓清,成步文,等. 硅基光子集成的器件及制作方法[P]. 2003-11-05.
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