| The Fabrication of Micro/Nano Structures by Laser Machining | |
| Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang | |
| 2019 | |
| Source Publication | Nanomaterials
 |
| Volume | 9Pages:1789 |
| Indexed By | SCI |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/29846 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang. The Fabrication of Micro/Nano Structures by Laser Machining[J]. Nanomaterials,2019,9:1789. |
| APA | Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang.(2019).The Fabrication of Micro/Nano Structures by Laser Machining.Nanomaterials,9,1789. |
| MLA | Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang."The Fabrication of Micro/Nano Structures by Laser Machining".Nanomaterials 9(2019):1789. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| The Fabrication of M（12437KB） | 期刊论文 | 作者接受稿 | 限制开放 | CC BY-NC-SA | Application Full Text | |
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