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The Fabrication of Micro/Nano Structures by Laser Machining
Liangliang Yang;   Jiangtao Wei ;   Zhe Ma ;   Peishuai Song;   Jing Ma ;   Yongqiang Zhao;   Zhen Huang ;   Mingliang Zhang ;   Fuhua Yang ;   Xiaodong Wang
2019
Source PublicationNanomaterials
Volume9Pages:1789
Indexed BySCI
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/29846
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang. The Fabrication of Micro/Nano Structures by Laser Machining[J]. Nanomaterials,2019,9:1789.
APA Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang.(2019).The Fabrication of Micro/Nano Structures by Laser Machining.Nanomaterials,9,1789.
MLA Liangliang Yang; Jiangtao Wei ; Zhe Ma ; Peishuai Song; Jing Ma ; Yongqiang Zhao; Zhen Huang ; Mingliang Zhang ; Fuhua Yang ; Xiaodong Wang."The Fabrication of Micro/Nano Structures by Laser Machining".Nanomaterials 9(2019):1789.
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