SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
气态束源炉瞬态开关控制真空装置
牛智川; 倪海桥; 徐晓华; 徐应强; 张纬; 韩勤; 吴荣汉
2004-11-24
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2003-05-19
Language中文
Application NumberCN03136238.9
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/2911
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
牛智川,倪海桥,徐晓华,等. 气态束源炉瞬态开关控制真空装置[P]. 2004-11-24.
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