High-resistive layers obtained through periodic growth and in situ annealing of InGaN by metalorganic chemical vapor deposition | |
Shuo Zhang; Ping Ma; Boting Liu; Dongxue Wu; Yuliang Huang; Junxi Wang; Jinmin Li | |
2016 | |
Source Publication | AIP Advances
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Volume | 6Issue:6Pages:065301 |
Subject Area | 半导体器件 |
Indexed By | SCI |
Date Available | 2017-03-16 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/28108 |
Collection | 中科院半导体照明研发中心 |
Recommended Citation GB/T 7714 | Shuo Zhang,Ping Ma,Boting Liu,et al. High-resistive layers obtained through periodic growth and in situ annealing of InGaN by metalorganic chemical vapor deposition[J]. AIP Advances,2016,6(6):065301. |
APA | Shuo Zhang.,Ping Ma.,Boting Liu.,Dongxue Wu.,Yuliang Huang.,...&Jinmin Li.(2016).High-resistive layers obtained through periodic growth and in situ annealing of InGaN by metalorganic chemical vapor deposition.AIP Advances,6(6),065301. |
MLA | Shuo Zhang,et al."High-resistive layers obtained through periodic growth and in situ annealing of InGaN by metalorganic chemical vapor deposition".AIP Advances 6.6(2016):065301. |
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