SIPOS 膜的结构组成

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	SIPOS 膜的结构组成
	谭凌; 雷沛云; 梁骏吾
	1995
Source Publication	半导体学报
Volume	16 Issue:12 Pages:890-896
Subject Area	光电子学
Date Available	2014-05-14
Document Type	期刊论文
Identifier	http://ir.semi.ac.cn/handle/172111/24955
Collection	中国科学院半导体研究所（2009年前）
Recommended Citation GB/T 7714	谭凌,雷沛云,梁骏吾. SIPOS 膜的结构组成[J]. 半导体学报,1995,16(12):890-896.
APA	谭凌,雷沛云,&梁骏吾.(1995).SIPOS 膜的结构组成.半导体学报,16(12),890-896.
MLA	谭凌,et al."SIPOS 膜的结构组成".半导体学报 16.12(1995):890-896.

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