SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
SIPOS 膜的结构组成
谭凌; 雷沛云; 梁骏吾
1995
Source Publication半导体学报
Volume16Issue:12Pages:890-896
Subject Area光电子学
Date Available2014-05-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24955
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
谭凌,雷沛云,梁骏吾. SIPOS 膜的结构组成[J]. 半导体学报,1995,16(12):890-896.
APA 谭凌,雷沛云,&梁骏吾.(1995).SIPOS 膜的结构组成.半导体学报,16(12),890-896.
MLA 谭凌,et al."SIPOS 膜的结构组成".半导体学报 16.12(1995):890-896.
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