SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
镜面起伏对1.55 μm Si基MEMS光滤波器的影响
左玉华; 毛容伟; 黄昌俊; 蔡晓; 李传波; 成步文; 罗丽萍; 高俊华; 白云霞; 姜磊; 马朝华; 王良臣; 余金中; 王启明
2003
Source Publication光子学报
Volume32Issue:6Pages:661-664
Abstract用传输矩阵方法,在简化的光学模型基础上,分别讨论了分布式Bragg反射镜DBR(Distributed Bragg Reflector)的生长精度及镜面起伏对1.55 μm Si基MEMS(Micro-Electro-Mechanical-System)可调谐光滤波器透射谱的影响。计算表明
metadata_83中国科学院半导体研究所;中科院半导体所
Subject Area光电子学
Funding Organization国家重点基础研究发展规划(973项目)G2 366 3,自然科学基金重大课题(No. 961 4 3),863项目2 2AA312 1
Indexed ByCSCD
Language中文
CSCD IDCSCD:1037467
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17953
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
左玉华,毛容伟,黄昌俊,等. 镜面起伏对1.55 μm Si基MEMS光滤波器的影响[J]. 光子学报,2003,32(6):661-664.
APA 左玉华.,毛容伟.,黄昌俊.,蔡晓.,李传波.,...&王启明.(2003).镜面起伏对1.55 μm Si基MEMS光滤波器的影响.光子学报,32(6),661-664.
MLA 左玉华,et al."镜面起伏对1.55 μm Si基MEMS光滤波器的影响".光子学报 32.6(2003):661-664.
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