SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity
Zuo Yuhua; Cai Xiao; Mao Rongwei; Huang Changjun; Cheng Buwen; Li Chuanbo; Luo Liping; Gao Junhua; Bai Yunxia; Jiang Lei; Ma Chaohua; Wang Liangchen; Yu Jinzhong; Wang Qiming
2003
Source Publication半导体学报
Volume24Issue:9Pages:911-915
AbstractA 1.55μm Fabry-Perot (F-P) thermo-optical tunable filter is fabricated. The cavity is made of amorphous silicon (a-Si) layer grown by electron-beam evaporation technique. Due to the excellent thermo-optical property of a-Si, the refractive index of the F-P cavity will be changed by heating; the transmittance resonant peak will therefore shift substantially. The measured tuning range is 12nm, FWHM (full-width-at-half-maximum) of the transmission peak is 9nm, and heating efficiency is 0.1K/mW. The large FWHM is mainly due to the non-ideal coating deposition and mirror undulation. Possible improvements to increase the efficiency of heating are suggested.
metadata_83institute of semiconductors, the chinese academy of sciences;national research center for optoelectroni technology, institute of semiconductors, the chinese academy of sciences
Subject Area光电子学
Funding OrganizationNational natural Science Foundation of China (No. 961 4 3),National high Technology research and Development Program of China (No. 2 2AA312 1 ),Project supported by State Key Development Program for Basic Research of China (No. G2 366 3)
Indexed ByCSCD
Language英语
CSCD IDCSCD:1212751
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/17801
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Zuo Yuhua,Cai Xiao,Mao Rongwei,et al. 1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity[J]. 半导体学报,2003,24(9):911-915.
APA Zuo Yuhua.,Cai Xiao.,Mao Rongwei.,Huang Changjun.,Cheng Buwen.,...&Wang Qiming.(2003).1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity.半导体学报,24(9),911-915.
MLA Zuo Yuhua,et al."1.55μm Fabry-Perot Thermo-Optical Tunable Filter with amorphous-Si as Cavity".半导体学报 24.9(2003):911-915.
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