Stability improvement of selective oxidation during the fabrication of InGaAs/GaAs vertical cavity surface emitting laser

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Stability improvement of selective oxidation during the fabrication of InGaAs/GaAs vertical cavity surface emitting laser
	Pan Z; Zhang Y; Du Y; Wu RH; Pan Z Tokyo Inst Technol Precis & Intelligence Lab Midori Ku 4259 Nagatsuta Yokohama Kanagawa 2268503 Japan.
	1998
会议名称	6th Microoptics Conference / 14th Topical Meeting on Gradient-Index Optical Systems (MOC/GRIN 97)
会议录名称	JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 37 (6B)
页码	3673-3675
会议日期	OCT 07-09, 1997
会议地点	TOKYO, JAPAN
出版地	DAINI TOYOKAIJI BLDG 24-8 SHINBASHI 4-CHOME, MINATO-KU TOKYO, 105, JAPAN
出版者	JAPAN J APPLIED PHYSICS
ISSN	0021-4922
部门归属	chinese acad sci, inst semicond, beijing 100083, peoples r china
摘要	The effects of the carrier gas flow and water temperature on the oxidation rate for different reaction temperatures were investigated. The optimum conditions for stable oxidation were obtained. Two mechanisms of the oxidation process are revealed. One is the flow-controlling process, which is unstable. The other is the temperature-controlling process, which is stable. The stable region decreases for higher reaction temperatures. The simulation results for the stable oxidation region are also given. With optimum oxidation conditions, the stability and precision of the oxidation can be dramatically improved.
关键词	Vcsel Selective Oxidation Stability Wet Oxidation Microstructure
学科领域	半导体物理
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/15071
专题	中国科学院半导体研究所（2009年前）
通讯作者	Pan Z Tokyo Inst Technol Precis & Intelligence Lab Midori Ku 4259 Nagatsuta Yokohama Kanagawa 2268503 Japan.
推荐引用方式 GB/T 7714	Pan Z,Zhang Y,Du Y,et al. Stability improvement of selective oxidation during the fabrication of InGaAs/GaAs vertical cavity surface emitting laser[C]. DAINI TOYOKAIJI BLDG 24-8 SHINBASHI 4-CHOME, MINATO-KU TOKYO, 105, JAPAN:JAPAN J APPLIED PHYSICS,1998:3673-3675.

条目包含的文件
文件名称/大小	文献类型	版本类型	开放类型	使用许可
3055.pdf（465KB）			限制开放	--	请求全文