Determination of the interdiffusion coefficients of liquid Zn and Sn using Ta/Zn-Sn/Si trilayers

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Determination of the interdiffusion coefficients of liquid Zn and Sn using Ta/Zn-Sn/Si trilayers
	Wang WK; Zhao JH; Wang WK Chinese Acad Sci Inst Phys POB 60334 Beijing 100080 Peoples R China.
	2001
会议名称	5th International Conference on Diffusion in Materials
会议录名称	DIFFUSIONS IN MATERIALS: DIMAT2000, PTS 1 & 2, 194-1
页码	883-889
会议日期	JUL 17-21, 2000
会议地点	PARIS, FRANCE
出版地	BRANDRAIN 6, CH-8707 UETIKON-ZUERICH, SWITZERLAND
出版者	SCITEC PUBLICATIONS LTD
部门归属	chinese acad sci, inst phys, beijing 100080, peoples r china; chinese acad sci, inst semicond, natl lab superlattices & microstruct, beijing 100083, peoples r china
摘要	In this paper we present a new method for measuring diffusion coefficients in liquid metals under convection-less conditions with solid/liquid-liquid/solid trilayer. The advantage of this kind of trilayer is that effects from gravity-induced convection and Marangoni-convection can be omitted, so that the diffusion coefficient is determined more accurately. The Ta/Zn-Sn/Si trilayer were prepared with a multi-target ion-beam sputtering deposition technique and annealed in an electric furnace under an argon atmosphere. The interdiffusion of liquid zinc and tin at 500 degrees degree C was investigated. The diffusion concentration profiles were determined by energy dispersive spectroscopy. The interdiffusion coefficients range from 1.0x10(-6)cm(2)/s to 2.8x10(-6)cm(2)/s, which is less than previous values measured by capillary reservoir technique under 1g-environment where various convection exist. The precise interdiffusion coefficients of liquid zinc and tin result from the removing of disturbances of various kinds of convection.
关键词	Convection-less Condition Liquid Metal Diffusion Solid/liquid-liquid/solid Trilayer
学科领域	半导体材料
主办者	Compagnie Gen Mat Nucl.; Minist Educ Natl, Acces Programme.; USA Res Lab, European Res Off, Off Naval Rech Sci, Dept Sci Chim.; Minis Affairs Etrang.; SNECMA Moteurs, GRP SNECMA.; ST Gobain Rech.; Commiss Energ Atom.; DRI.; CEREM.; DECM.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/14919
专题	中国科学院半导体研究所（2009年前）
通讯作者	Wang WK Chinese Acad Sci Inst Phys POB 60334 Beijing 100080 Peoples R China.
推荐引用方式 GB/T 7714	Wang WK,Zhao JH,Wang WK Chinese Acad Sci Inst Phys POB 60334 Beijing 100080 Peoples R China.. Determination of the interdiffusion coefficients of liquid Zn and Sn using Ta/Zn-Sn/Si trilayers[C]. BRANDRAIN 6, CH-8707 UETIKON-ZUERICH, SWITZERLAND:SCITEC PUBLICATIONS LTD,2001:883-889.

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