Integrated multimode interference couplers in silicon-on insulator
Wei HZ; Yu YZ; Zhang XF; Liu ZL; Ma HZ; Li GH; Shi W; Fang CS; Wei HZ Chinese Acad Sci Inst Semicond State Key Lab INtegrated Optoelect Beijing 100083 Peoples R China.
2000
会议名称Conference on Optical Interconnects for Telecommunication and Data Communications
会议录名称OPTICAL INTERCONNECTS FOR TELECOMMUNICATION AND DATA COMMUNICATIONS, 4225
页码124-127
会议日期NOV 08-10, 2000
会议地点BEIJING, PEOPLES R CHINA
出版地1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者SPIE-INT SOC OPTICAL ENGINEERING
ISSN0277-786X
ISBN0-8194-3896-0
部门归属chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china
摘要Silicon-on insulator (SOI) is an attractive platform for the fabrication of optoelectronic integrated circuit. Thin cladding layers (< 1.0m) can be used in SOI waveguide due to the large index step between Si and SiO2, making them compatible with the VLSI technology. Here we demonstrate the fabrication of 1 x 4 and 2 x 2 multimode interference (MMI) coupler based on SOI technology. Performances of the devices are analyzed. The minimum excess loss of the devices is about 1.8dB. The devices show uniform power distribution.
关键词Soi Multimode Interference Optical Waveguide Device Integrated Optics Power Splitters
学科领域半导体器件
主办者China Opt & Optoelectr Manufacturers Assoc.; Chinese Phys Soc.; SPIE.
收录类别CPCI-S
语种英语
文献类型会议论文
条目标识符http://ir.semi.ac.cn/handle/172111/13727
专题中国科学院半导体研究所(2009年前)
通讯作者Wei HZ Chinese Acad Sci Inst Semicond State Key Lab INtegrated Optoelect Beijing 100083 Peoples R China.
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Wei HZ,Yu YZ,Zhang XF,et al. Integrated multimode interference couplers in silicon-on insulator[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2000:124-127.
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