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Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers
Xiao X (Xiao Xi); Zhu Y (Zhu Yu); Xu HH (Xu Hai-Hua); Zhou LA (Zhou Liang); Hu YT (Hu Ying-Tao); Li ZY (Li Zhi-Yong); Li YT (Li Yun-Tao); Yu YD (Yu Yu-De); Yu JZ (Yu Jin-Zhong); Xiao, X, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China. E-mail Address: yudeyu@semi.ac.cn; jzyu@semi.ac.cn
2010
Source PublicationCHINESE PHYSICS LETTERS
Volume27Issue:9Pages:Art. No. 094207
AbstractA wafer-level testable silicon-on-insulator-based microring modulator is demonstrated with high modulation speed, to which the grating couplers are integrated as the fiber-to-chip interfaces. Cost-efficient fabrications are realized with the help of optical structure and etching depth designs. Grating couplers and waveguides are patterned and etched together with the same slab thickness. Finally we obtain a 3-dB coupling bandwidth of about 60nm and 10 Gb/s nonreturn-to-zero modulation by wafer-level optical and electrical measurements.
metadata_24其它
KeywordCmos Soi Technology Wave-guides Photonics
Subject Area光电子学
Funding OrganizationSupported by the State Key Development Program for Basic Research of China under Grant No 2006CB302803, and the National Natural Science Foundation of China under Grant No 60877036
Indexed BySCI
Language英语
Date Available2010-10-11
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/13540
Collection集成光电子学国家重点实验室
Corresponding AuthorXiao, X, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, POB 912, Beijing 100083, Peoples R China. E-mail Address: yudeyu@semi.ac.cn; jzyu@semi.ac.cn
Recommended Citation
GB/T 7714
Xiao X ,Zhu Y ,Xu HH ,et al. Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers[J]. CHINESE PHYSICS LETTERS,2010,27(9):Art. No. 094207.
APA Xiao X .,Zhu Y .,Xu HH .,Zhou LA .,Hu YT .,...&jzyu@semi.ac.cn.(2010).Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers.CHINESE PHYSICS LETTERS,27(9),Art. No. 094207.
MLA Xiao X ,et al."Wafer-Level Testable High-Speed Silicon Microring Modulator Integrated with Grating Couplers".CHINESE PHYSICS LETTERS 27.9(2010):Art. No. 094207.
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