直径六英寸半绝缘砷化镓单晶生长技术

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

Subject Area	半导体材料
	直径六英寸半绝缘砷化镓单晶生长技术
	李晋闽; 曾一平; 惠峰; 卜俊鹏; 王文军; 郑红军; 孙红方
Subtype	省部级
Award Level	二等奖
	2007
Keyword	六英寸半绝缘砷化镓单晶
Language	中文
Document Type	成果
Identifier	http://ir.semi.ac.cn/handle/172111/11134
Collection	中国科学院半导体研究所（2009年前）
Recommended Citation GB/T 7714	李晋闽,曾一平,惠峰,等. 直径六英寸半绝缘砷化镓单晶生长技术. 2007.

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