Liquid nitrogen flowrate alarm system for MBE

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Liquid nitrogen flowrate alarm system for MBE
	Sun YW; Li SY; Ni HQ; Xu Y; Chen LH; Sun, YW, Chinese Acad Sci, Inst Semicond, 912 PO Box, Beijing 100083, Peoples R China.
	2004
会议名称	5th International Conference on Thin Film Physics and Applications
会议录名称	FIFTH INTERNATIONAL CONFERENCE ON THIN FILM PHYSICS AND APPLICATIONS丛书标题: PROCEEDINGS OF THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS (SPIE)
页码	5774: 423-425
会议日期	MAY 31-JUN 02, 2004
会议地点	Shanghai, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	0-8194-5755-8
部门归属	chinese acad sci, inst semicond, beijing 100083, peoples r china
摘要	Liquid nitrogen is very important for MBE system. Most MBE systems use the liquid nitrogen to absorb the impurity molecules. If MBE cryoshroud is lack of liquid nitrogen, the pressure of the growth chamber will grow. This will affect the film quality. But too much liquid nitrogen is a waste. We have developed a liquid nitrogen flowrate alarm system to monitor the liquid nitrogen status in MBE cryoshroud. In this method, a temperature sensor is placed at the end of the cryoshroud. The temperature varies with changing of the liquid nitrogen status in cryoshroud. If the liquid nitrogen level in the cryoshroud is too low or too high, the LNFA will send out an alarm to warn the user to adjust the liquid nitrogen flowrate. In our experiments, we found this method works well, and the temperature responds sensitively. With the help of this system, people can view the liquid nitrogen status of the entire growth process. Compare with other method. it is very cheap.
关键词	Liquid Nitrogen(Ln2)
学科领域	半导体材料
主办者	Chinese Phys Soc.; Shanghai Phys Soc.; Natl Nat Sci Fdn China.; E China Normal Univ, Sch Informat Sci & Technol.; Fudan Univ, Appl Surface Phys Lab.; Natl Lab Infrared Phys.; CAS, Shanghai Inst Tech Phys.; E China Normal Univ, Key Lab Opt & Magnet Resonance Spectroscopy.
收录类别	其他
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/10066
专题	中国科学院半导体研究所（2009年前）
通讯作者	Sun, YW, Chinese Acad Sci, Inst Semicond, 912 PO Box, Beijing 100083, Peoples R China.
推荐引用方式 GB/T 7714	Sun YW,Li SY,Ni HQ,et al. Liquid nitrogen flowrate alarm system for MBE[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2004:5774: 423-425.

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